✦ LIBER ✦
SIMS studies on anomalous behavior of phosphorus and other implants in silicon: Paul K Chu et al, Rad Effects, 61, 1982, 201–205
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 175 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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