✦ LIBER ✦
SIMS quantification of thick Si1−x Gex films (0 ≤ x ≤ 1) using the isotopic comparative method under Ar+ beam
✍ Scribed by G. Prudon; C. Dubois; B. Gautier; J.C. Dupuy; J.P. Graf; Y. Le Gall; D. Muller
- Book ID
- 115562044
- Publisher
- John Wiley and Sons
- Year
- 2012
- Tongue
- English
- Weight
- 723 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0142-2421
- DOI
- 10.1002/sia.5137
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