✦ LIBER ✦
SIMS analysis of thin surface layers and low kV ion implants related to VLSI and VHSIC materials development: B F Phillips, J Vac Sci Technol, 20 (3), 1982, 793–796
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 180 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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