SIMS analysis of oxynitrides: evidence for nitrogen diffusion induced by oxygen flooding

✍ Scribed by H. De Witte; T. Conard; W. Vandervorst; R. Gijbels

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 116 KB
• Volume: 29
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/1096-9918(200011)29:11<761::aid-sia926>3.0.co;2-f