✦ LIBER ✦
Simple theoretic approach to estimate the effect of gravity and thermophoresis on the diffusional nanoparticle contamination under low pressure conditions
✍ Scribed by C. Asbach; H. Fissan; J. H. Kim; S. Yook; D. Y. H. Pui
- Book ID
- 121820990
- Publisher
- AVS (American Vacuum Society)
- Year
- 2007
- Tongue
- English
- Weight
- 882 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0734-211X
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