✦ LIBER ✦

Simple mathematical model for negative photoresist behavior

✍ Scribed by Frejlich, J.; Clair, J. J.

Book ID: 115384169
Publisher: Optical Society of America
Year: 1977
Weight: 501 KB
Volume: 67
Category: Article
ISSN: 0030-3941
DOI: 10.1364/JOSA.67.000092

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