Simple fabrication of high density concave nanopyramid array (NPA)on Si surface

✍ Scribed by S Sawara; M Koh; T Goto; Y Ando; T Shinada; I Ohdomari

• Book ID: 108416179
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 857 KB
• Volume: 159-160
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(00)00118-5