Simple composition control of ferroelectric thin films grown by sputtering with an original oxides target design

✍ Scribed by D. Remiens; M. Descamps; B. Jaber; B. Thierry

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 264 KB
• Volume: 29
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(95)00148-4