SIMOX SOI for integrated circuit fabrication : Hon Wai Lam. IEEE Circuits Devices Mag., 6 (July 1987)

• Book ID: 103282896
• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 118 KB
• Volume: 28
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(88)90216-8