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SIMOX: processing, layer parameters design, and defects control

✍ Scribed by Yupu Li; C.D. Marsh; A. Nejim; R.J. Chater; J.A. Kilner; P.L.F. Hemment

Book ID: 113286266
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 532 KB
Volume: 99
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)00043-7

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