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Silicon-wafer process evaluation using minority-carrier diffusion-length measurement by the SPV method : A. M. Goodman, L. A. Goodman and H. F. Gossenberger. RCA Rev.44, 326 (June 1983)


Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
134 KB
Volume
24
Category
Article
ISSN
0026-2714

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