✦ LIBER ✦
Silicon wafer preparation for low-temperature selective epitaxial growth : Carl Galewski, Jen-Chung Lou and William G. Oldham. IEEE Trans. Semicond. Mfg3(3), 93 (1990)
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 124 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0026-2714
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