Silicon wafer orientation dependence in the initial plasma oxidation processes

✍ Scribed by H. Kuroki; K.G. Nakamura; T. Kawabe; M. Kitajima

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 247 KB
• Volume: 88
• Category: Article
• ISSN: 0038-1098
• DOI: 10.1016/0038-1098(93)90619-x