Silicon trench etch in a hex reactor: G K Herb et al, Solid State Technol, 30, 1987, 109–115

• Book ID: 103468541
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 142 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90522-8