𝔖 Bobbio Scriptorium
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Silicon sensors as process monitoring devices

✍ Scribed by P. A. Beck; B. A. Auld; K. -S. Kim

Book ID
105254522
Publisher
Springer
Year
1994
Tongue
English
Weight
25 KB
Volume
5
Category
Article
ISSN
0934-9847

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## Abstract This paper describes the design and characterization of a silicon‐based sensor chip for monitoring of fermentation processes. The sensor chip consists of three sensors using different transducer principles. A capacitive electrolyte‐insulator‐semiconductor (EIS) field‐effect structure wi