Silicon Self-Interstitial Kinetics Study by Means of Thin Membranes under Thermal Oxinitridation

✍ Scribed by Carrillo-López, J. ;Morales-Acevedo, A.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 387 KB
• Volume: 173
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199906)173:2<289::aid-pssa289>3.0.co;2-v