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Silicon pn junction imaging and characterizations using sensitivity enhanced Kelvin probe force microscopy

✍ Scribed by Kikukawa, Atsushi; Hosaka, Sumio; Imura, Ryo

Book ID: 111961447
Publisher: American Institute of Physics
Year: 1995
Tongue: English
Weight: 452 KB
Volume: 66
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.113780

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