✦ LIBER ✦
Silicon oxide thin films obtained by Ar+ bombardment of Si(100) in oxygen atmosphere at room temperature
✍ Scribed by A. Terrasi; J. Almeida; C. Coluzza; G. Margaritondo
- Book ID
- 113287785
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 364 KB
- Volume
- 116
- Category
- Article
- ISSN
- 0168-583X
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