✦ LIBER ✦
Silicon nitride film synthesis at reduced silane pressure: S M Repinskiy et al, Neorg Mater, 7 (8), 1971, 1347–1350 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1972
- Tongue
- English
- Weight
- 178 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0042-207X
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