✦ LIBER ✦
Silicon nitride film as GaAs annealing encapsulant : A. Kiermasz, A. McQuarrie and J. Bhardwaj. Semiconductor int., 107 (November 1987)
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 127 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0026-2714
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