Silicon nitride as a mask in phosphorus diffusion : I. Franz and W. Langheinrich, Solid-St. Electron. 12 (1969), p. 955

• Publisher: Elsevier Science
• Year: 1970
• Tongue: English
• Weight: 111 KB
• Volume: 9
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(70)90375-6