Silicon nanofabrication by electron beam lithography and laser-assisted electrochemical size-reduction

✍ Scribed by Robert Juhasz; Jan Linnros

• Book ID: 114155457
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 406 KB
• Volume: 61-62
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(02)00532-4