✦ LIBER ✦
Silicon MOSFETs on insulator with lithography-independent 100 nm channel length
✍ Scribed by V. Dudek; W. Appel; L. Beer; G. Digele; B. Höfflinger; H. Schneider
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 576 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2692
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