✦ LIBER ✦
Silicon microstructure fabricated by laser micro-patterning method combined with wet etching process
✍ Scribed by T. Oishi; M. Goto; Y. Pihosh; A. Kasahara; M. Tosa
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 207 KB
- Volume
- 241
- Category
- Article
- ISSN
- 0169-4332
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