✦ LIBER ✦

Silicon Micromechanical Devices

✍ Scribed by Angell, James B.; Terry, Stephen C.; Barth, Phillip W.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Small print [micromechanical devices]

✍ Ward, M. 📂 Article 📅 2000 🏛 The Institution of Electrical Engineers 🌐 English ⚖ 223 KB

Polycrystalline Silicon Micromechanical

✍ Howe, R. T. 📂 Article 📅 1983 🏛 The Electrochemical Society 🌐 English ⚖ 767 KB

Micromechanical fracture strength of sil

✍ Ericson, Fredric; Schweitz, Jan-AÌke 📂 Article 📅 1990 🏛 American Institute of Physics 🌐 English ⚖ 926 KB

Micromechanical Membrane Switches on Sil

✍ Petersen, K. E. 📂 Article 📅 1979 🏛 IBM 🌐 English ⚖ 996 KB

Micromechanical devices for intravascula

✍ Michael L. Reed; Clarence Wu; James Kneller; Simon Watkins; David A. Vorp; Ahmed 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 177 KB

Adhesion-related failure mechanisms in m

✍ C.H. Mastrangelo 📂 Article 📅 1997 🏛 Springer US 🌐 English ⚖ 482 KB