✦ LIBER ✦
Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers
✍ Scribed by Meng-Hsiung Kiang; Solgaard, O.; Muller, R.S.; Lau, K.Y.
- Book ID
- 118748384
- Publisher
- IEEE
- Year
- 1996
- Tongue
- English
- Weight
- 584 KB
- Volume
- 8
- Category
- Article
- ISSN
- 1041-1135
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