✦ LIBER ✦
Silicon microlens structures fabricated by scanning-probe gray-scale oxidation
✍ Scribed by Chen, C.-F.; Tzeng, S.-D.; Chen, H.-Y.; Gwo, S.
- Book ID
- 115427279
- Publisher
- Optical Society of America
- Year
- 2005
- Tongue
- English
- Weight
- 297 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0146-9592
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