Silicon microelectronics technology

✍ Scribed by James T. Clemens

• Book ID: 101755412
• Publisher: Institute of Electrical and Electronics Engineers
• Year: 2002
• Tongue: English
• Weight: 303 KB
• Volume: 2
• Category: Article
• ISSN: 1089-7089
• DOI: 10.1002/bltj.2084

✦ Synopsis

This section presents a historical review of the technology revolution, from the invention of the first integrated circuit (IC) to today's very large scale integration (VLSI) technology.

The Present

This section reviews the development of the manufacturing technology of present day microelectronics, based on the "planar process." It describes silicon crystal technology, crystal dopant techniques, silicon oxidation development, lithography, materials deposition processes, pattern transfer mechanisms, metal interconnect technology, and material passivation technology.

The Future

Today's microelectronics industry faces major technical and economic issues. This section discusses the paths that the industry may take in these areas.