Silicon microdischarge devices having inverted pyramidal cathodes: Fabrication and performance of arrays

✍ Scribed by Park, S.-J.; Chen, J.; Liu, C.; Eden, J. G.

• Book ID: 120638312
• Publisher: American Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 348 KB
• Volume: 78
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1338971