Silicon MBE apparatus for uniform high-rate deposition on standard format wafers.: J C Bean and E A Sadowski, J Vac Sci Technol, 20 (2), 1982, 137–142

• Book ID: 103468074
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 151 KB
• Volume: 35
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(85)90550-0