Silicon interstitial trapping in polycrystalline silicon films studied by monitoring interstitial reactions with underlying insulating films

✍ Scribed by Tsoukalas, D.; Kouvatsos, D.

• Book ID: 120030036
• Publisher: American Institute of Physics
• Year: 1996
• Tongue: English
• Weight: 441 KB
• Volume: 68
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.115695