✦ LIBER ✦
Silicon field emission array as novel charge neutralization device for high current ion implanter
✍ Scribed by J. Ishikawa; Y. Gotoh; K. Nakamura; T. Kojima; H. Tsuji; T. Ikejiri; S. Sakai; S. Umisedo; N. Nagai; M. Nagao; S. Kanemaru
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 222 KB
- Volume
- 237
- Category
- Article
- ISSN
- 0168-583X
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