✦ LIBER ✦
Silicon device miniaturization and its effect on processing techniques : F. Z. Bathael. Microelectron. J.20(4), 1 (1989)
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 132 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
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