✦ LIBER ✦
Silicon-containing polymer: its plasma deposition and photolithographic processing : Zdenek Novotny. TESLA Electron. 2 56 (1984)
- Book ID
- 103282702
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 121 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0026-2714
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