✦ LIBER ✦
Silicon-containing copolymers of MMA tested for a positive-tone high-resolution bi-layer e-beam resist system
✍ Scribed by J. Maessen; S. van den Boogaart; E.J.K. Verstegen; J.G. Kloosterboer; F.C.M.J.M. van Delft; W. Catsburg; F.H.P.M. Habraken
- Book ID
- 108207413
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 271 KB
- Volume
- 78-79
- Category
- Article
- ISSN
- 0167-9317
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