Silicon Carbide Membranes Modified by Chemical Vapor Deposition Using Species of Low Sticking Coefficients in a Silane/Acetylene Reaction System

✍ Scribed by Lang-Luen Lee; Dah-Shyang Tsai

• Book ID: 110827431
• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 679 KB
• Volume: 81
• Category: Article
• ISSN: 0002-7820
• DOI: 10.1111/j.1151-2916.1998.tb02308.x