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Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD

✍ Scribed by J.C. Rostaing; F. Coeuret; B. Drevillon; R. Etemadi; C. Godet; J. Huc; J.Y. Parey; V.A. Yakovlev


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
594 KB
Volume
236
Category
Article
ISSN
0040-6090

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