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Silicided Au/Ni bilayer on p-type [001] silicon for low contact resistance metallization schemes

✍ Scribed by Badalà, Paolo; Santangelo, Antonello; Pellegrino, Giovanna; Alberti, Alessandra

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Low-resistance ohmic contacts on p-type

✍ Chu, Chen-Fu; Yu, C. C.; Wang, Y. K.; Tsai, J. Y.; Lai, F. I.; Wang, S. C. 📂 Article 📅 2000 🏛 American Institute of Physics 🌐 English ⚖ 279 KB