We show that silane pyrolysis is initiated by decomposition on the amorphous silicon surface, with an activation energy E, of 56 kcal/mole. The observed surface decomposition rate is only weakly dependent on silane pressure. Much faster delayed decomposition rates, approximately independent of surfa
Silane pyrolysis in a piston reactor
β Scribed by Philip W. Morrison Jr.; Jeffrey A. Reimer
- Publisher
- American Institute of Chemical Engineers
- Year
- 1989
- Tongue
- English
- Weight
- 1008 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0001-1541
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