Silane Flow Rate Dependence of SiO[sub x] Cap Layer Induced Impurity-Free Intermixing of GaAs/AlGaAs Quantum Wells

✍ Scribed by Deenapanray, Prakash N. K.; Tan, H. H.; Cohen, Michael I.; Gaff, Keith; Petravic, Mladen; Jagadish, C.

• Book ID: 121719423
• Publisher: The Electrochemical Society
• Year: 2000
• Tongue: English
• Weight: 411 KB
• Volume: 147
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.1393464