Significance of charge exchange in the determination of yields in broad-beam ion etching : J. M. Villalvilla, C. Santos and J. A. Valles-Abarca. Vacuum39(7/8), 683 (1989)

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 132 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90262-l