✦ LIBER ✦

Signal analysis of the end point detection method based on motor current

✍ Scribed by Sang-Yong Kim; Chang-Jun Park; Yong-Jin Seo

Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 443 KB
Volume: 66
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(02)00930-9

No coin nor oath required. For personal study only.

✦ Synopsis

We first studied the factors affecting the motor current (MC) signal. It was found to be strongly affected by systematic hardware noise depending on the polishing recipe, such as pad conditioning and arm oscillation. We then studied the end point detection (EPD) for the chemical mechanical polishing (CMP) process of the shallow trench isolation (STI) structure with a reverse moat pattern. The MC signal showed a high amplitude peak in the fore part caused by the reverse moat pattern. We also found that the end point (EP) could not be detected properly and reproducibly due to the pad conditioning effect, especially when a conventional low selectivity slurry was used. Even when there was no pad conditioning effect, the EPD method could not be applied, since the measured end point was always the same due to the characteristics of the open nitride structure.

📜 SIMILAR VOLUMES

Multi-cracks detection of a beam-like st

Multi-cracks detection of a beam-like structure based on the on-vehicle vibration signal and wavelet analysis

✍ Khoa Viet Nguyen; Hai Thanh Tran 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 361 KB

In this paper, a new method for detecting a multi-cracked beam-like structure subjected to a moving vehicle is presented. The crack model is adopted from fracture mechanics. The dynamic response of the bridge–vehicle system is measured directly from the moving vehicle. When moving along the structur

On the analysis of fluctuating velocity

On the analysis of fluctuating velocity signals through methods based on the wavelet and Hilbert transforms

✍ Guido Buresti; Giovanni Lombardi; Jacopo Bellazzini 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 421 KB

In the present paper we describe signal processing procedures based on the wavelet and Hilbert transforms, which may be used to characterize the time variation of the amplitude and frequency modulations that are present in the fluctuating components of experimental velocity signals. The classical Hi

Extranodal spread in the neck: MRI detec

Extranodal spread in the neck: MRI detection on the basis of pixel-based time-signal intensity curve analysis

✍ Misa Sumi; Takashi Nakamura 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 815 KB

## Abstract ## Purpose We evaluated dynamic contrast‐enhanced (DCE) magnetic resonance imaging (MRI) for the preoperative detection of extranodal spread (ENS) in metastatic nodes in the neck. ## Materials and Methods The time‐signal intensity curve (TIC) profiles of 54 histologically proven meta

On complexity analysis of the primal–dua

On complexity analysis of the primal–dual interior-point method for semidefinite optimization problem based on a new proximity function

✍ Bo Kyung Choi; Gue Myung Lee 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 351 KB

Development of current-based microscopic

Development of current-based microscopic defect analysis method using optical filling techniques for the defect study on heavily irradiated high-resistivity Si sensors/detectors

✍ Z. Li; C.J. Li 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 175 KB

Current-based microscopic defect analysis method such as current deep level transient spectroscopy (I-DLTS) and thermally stimulated current have been developed over the years at Brookhaven National Laboratory (BNL) for the defect characterizations on heavily irradiated (F n X10 13 n/cm 2 ) high-res