✦ LIBER ✦

Sidewall polishing with a gas cluster ion beam for photonic device applications

✍ Scribed by Emmanuel Bourelle; Akiko Suzuki; Akinobu Sato; Toshio Seki; Jiro Matsuo

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The use of a Ga + focused ion beam to mo

✍ Archanjo, B S; Barboza, A P M; Neves, B R A; Malard, L M; Ferreira, E H M; Brant 📂 Article 📅 2012 🏛 Institute of Physics 🌐 English ⚖ 783 KB

Sources of gas-ion beams with current up

✍ N. N. Semashko; V. M. Kulygin; A. A. Panasenkov; N. V. Pleshivtsev 📂 Article 📅 1997 🏛 Springer US 🌐 English ⚖ 477 KB