✦ LIBER ✦
Sidewall passivation layer thickness and composition profiles of etched silicon patterns from angle resolved x-ray photoelectron spectroscopy analysis
✍ Scribed by Haass, Moritz; Darnon, Maxime; Joubert, Olivier
- Book ID
- 120025545
- Publisher
- American Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 688 KB
- Volume
- 111
- Category
- Article
- ISSN
- 0021-8979
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