✦ LIBER ✦
Sidewall epitaxial piezoresistor process and characterisation for in-plane force sensing applications
✍ Scribed by Barlian, A.A.; Harjee, N.; Pruitt, B.L.
- Book ID
- 114461338
- Publisher
- The Institution of Engineering and Technology
- Year
- 2009
- Tongue
- English
- Weight
- 509 KB
- Volume
- 4
- Category
- Article
- ISSN
- 1750-0443
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