✦ LIBER ✦
SiC/Si(111) film quality as a function of GeH4flow in an MOCVD reactor
✍ Scribed by Wendy L. Sarney; L. Salamanca-Riba; R. D. Vispute; P. Zhou; C. Taylor; M. G. Spencer; K. A. Jones
- Book ID
- 107452431
- Publisher
- Springer US
- Year
- 2000
- Tongue
- English
- Weight
- 425 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0361-5235
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