✦ LIBER ✦
Si wire array waveguide grating with stray light reduction scheme fabricated by ArF excimer immersion lithography
✍ Scribed by Onawa, Y.; Seki, M.; Oshtsuka, M.; Sasaki, H.; Nishi, H.; Koshino, K.; Tsuchizawa, T.; Yaegashi, H.; Yokoyama, N.; Takahashi, H.; Horikawa, T.; Yamada, K.; Shimura, D.; Okayama, H.
- Book ID
- 121360386
- Publisher
- The Institution of Electrical Engineers
- Year
- 2013
- Tongue
- English
- Weight
- 325 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0013-5194
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