Si wafer bonded of a-Si∕a-SiN[sub x] distributed Bragg reflectors for 1.55-μm-wavelength vertical cavity surface emitting lasers

✍ Scribed by Levallois, C.; Le Corre, A.; Loualiche, S.; Dehaese, O.; Folliot, H.; Paranthoen, C.; Thoumyre, F.; Labbé, C.

• Book ID: 120323290
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 449 KB
• Volume: 98
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.2009075