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Si Photo etching in Cl2 gas using a high power Hg lamp

✍ Scribed by Eiji Ikawa; Shigeyuki Sugito; Yukinori Kurogi

Book ID: 104195224
Publisher: Elsevier Science
Year: 1987
Weight: 58 KB
Volume: 183
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(87)90156-3

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