Si nanoadhesion layer for enhanced SiO2–SiN wafer bonding

✍ Scribed by Ryuichi Kondou; Tadatomo Suga

• Book ID: 113899037
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 571 KB
• Volume: 65
• Category: Article
• ISSN: 1359-6462
• DOI: 10.1016/j.scriptamat.2011.04.040